Patrick Paniez
IdRefMots clés
FR
Sciences appliquees
Electronique
Etude experimentale
Fabrication microelectronique
Lithographie
Rayonnement uv
Photoresist
Resist positif
Polymere
Diffusion
Traitement thermique
Volume libre
Resine photosensible
Amplification chimique
Experimental study
Microelectronic fabrication
Lithography
Ultraviolet radiation
Positive resist
Polymer