Le moteur de recherche
des thèses françaises
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Etude des mécanismes élémentaires du dépot de couches minces d'oxyde d'étain par le procédé PACVD
FR |
EN
| Auteur / Autrice : | Jérôme Pulpytel |
| Direction : | Farzaneh Arefi-Khonsari |
| Type : | Thèse de doctorat |
| Discipline(s) : | Génie des procédés |
| Date : | Soutenance en 2005 |
| Etablissement(s) : | Paris 6 |