@PHDTHESIS{bostr2001, url = " http://www.theses.fr/2001AIX30073", title = "Wafer shape control. Study of the reactivity in Ti/Al dual layers and its effect on the stress", author = "Bostrom, Ola", year = "2001", pages = "155 p.", note = "Thèse de doctorat dirigée par Thomas, Olivier Sciences des matériaux Aix-Marseille 3 2001", note = "2001AIX30073", }