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Contribution a l'etude des siliciures de chrome et de palladium realises par recuits electroniques pulses : applications aux contacts ohmiques chrome-silicium et palladium-silicium
FR
| Auteur / Autrice : | Ea Kim-Ung Buntha |
| Direction : | Augustin Martinez |
| Type : | Thèse de doctorat |
| Discipline(s) : | Électronique |
| Date : | Soutenance en 1986 |
| Etablissement(s) : | Toulouse, INSA |
Mots clés
FR
Résumé
FR
Diminution de la resistivite des contacts ohmiques chrome-silicium et palladium-silicium par la methode du recuit electronique pulse